CTI Manual. CTI Sytems 2019-01-14

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Cryopumps, Cryochillers & Compressors

CTI Manual

Utilizing direct drive technology and on-board controls, these systems play a key role in your performance and productivity. This is why Brooks created a Fixed Price Repair program to support the MagnaTran 7 robot. Extensive downtime due to repair is not an option. The Brooks kinematic mounting system, patented motion control technology, and reliable direct drive robotics, Razor robots enable fast set-up, high repeatability, and maximum uptime. These cryochillers can be used to capture water vapor and other condensable substances by freezing them onto a cold surface such as a cryocoil or chevron baffle.

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It is an intelligent and flexible factory interface module for 300mm and 450mm tool automation. Offers improved reliability and maximized efficiency, while delivering industry-leading cleanliness with the lowest particle levels. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time. . We offer a range of systems—available in numerous configurations for 100mm to 450mm wafer transport—that meet specific manufacturing environment and process requirements. An integrated cryopump power frequency converter assures maximum cryopump performance in both 50 and 60 Hz applications for all Brooks vacuum pumps.

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CTI Manual

With the MagnaTran 7 lengthy repair cycle times can lead to increased costs and unscheduled downtime. MaxCool cryochillers are also used to cool and heat objects such as electrostatic chucks used in semiconductor wafer processing. A patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance for exceptional process consistency. Jet features a flexible, modular architecture based on industry standards to enable fast set-up, reduced cycle times, and seamless integration with existing fab equipment and processes. . .

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